Continuous YBa2Cu3O7-tape deposition by thermal evaporation

被引:15
作者
Nemetschek, R
Prusseit, W
Holzapfel, B
Eickemeyer, J
DeBoer, B
Miller, U
Maher, E
机构
[1] Met Werk Plansee GmbH, D-86983 Lechbruck, Germany
[2] IFW Dresden, D-01069 Dresden, Germany
[3] Oxford Instruments Superconduct Ltd, Abingdon OX13 5QX, Oxon, England
[4] THEVA Dunnschichttech GmbH, D-85386 Eching Dietersheim, Germany
来源
PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 2002年 / 372卷
关键词
coated conductors; continuous deposition; evaporation; buffer layer;
D O I
10.1016/S0921-4534(02)00887-0
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ni and Ni-alloy rolling assisted biaxially textured substrates provided both from IFW Dresden and an industrial partner (Plansee GmbH) were employed for the deposition of YBCO-coated conductors by thermal evaporation. The main advantages of this process are high volume deposition rates and relatively low substrate temperatures Of 680 degreesC. As a consequence. a simple, economic, and very thin 100 nm CeO2 buffer layer has turned Out to be sufficient for high quality YBCO growth, For samples up to 20 cm long, critical current densities of 1 2 MA/cm(2) were achieved at 77 K and 2 mum thick films sustained transport currents beyond 150 A. Recently, the first continuously Operating prototype tape deposition system based on thermal evaporation has been put into operation, A reel-to-reel tape winding mechanism is capable of handling YBCO and buffer layer deposition on tape 10 mm wide and up to 100 m long has been implemented. The YBCO-deposition speed of 4 m/h for a 1 mum layer, (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:880 / 882
页数:3
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