Temporal and spectral characteristics of back-illuminated InGaAs metal-semiconductor-metal photodetectors

被引:5
作者
Hargis, MC
Ralph, SE
Woodall, J
McInturff, D
Negri, AJ
Haugsjaa, PO
机构
[1] PURDUE UNIV,DEPT ELECT & COMP ENGN,W LAFAYETTE,IN 47907
[2] GTE LABS INC,WALTHAM,MA 02254
关键词
D O I
10.1109/68.475795
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report dramatic differences in the impulse response and wavelength dependence of back versus top illuminated In0.53Ga0.47As planar metal-semiconductor-metal devices. Via direct measurement of transit-time limited devices we identify the mechanisms involved and thereby allow the optimum design of multi-Gbit, high responsivity back-illuminated devices. We show that responsivities greater than 0.8 A/W are achievable with >8 GHz bandwidth for 50-mu m-diameter devices.
引用
收藏
页码:110 / 112
页数:3
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