Crystal morphology evolution in film growth: A general approach

被引:7
作者
Du, Danxu [1 ]
Srolovitz, David J. [1 ]
机构
[1] Princeton Univ, Dept Mech & Aerosp Engn, Princeton, NJ 08544 USA
关键词
crystal morphology; diffusion; growth models; interfaces; metalorganic chemical vapor deposition;
D O I
10.1016/j.jcrysgro.2006.08.024
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Most crystal growth processes involve many competing mechanisms, all of which can affect the observed morphology evolution. This paper provides a framework for understanding growth competition and determining which mechanisms dominate the morphology under different conditions. The approach is based upon the development of a generalized growth law combined with asymptotic analysis. Next, we show how this model unifies many of the physical processes that are known to be of importance in film growth. Next, we provide a graph theoretic method for analyzing growth competition and identifying the morphology-determining processes and parameters. As an example, we apply the present approach to the case of metalorganic chemical vapor deposition of GaN. Finally, we examine how the mechanisms that control morphology evolution change as the crystal grows larger. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:86 / 96
页数:11
相关论文
共 20 条
[1]  
Barabasi A.-L., 1995, FRACTAL CONCEPTS SUR, DOI [10.1017/CBO9780511599798, DOI 10.1017/CBO9780511599798]
[2]   VECTOR THERMODYNAMICS FOR ANISOTROPIC SURFACES .2. CURVED AND FACETED SURFACES [J].
CAHN, JW ;
HOFFMAN, DW .
ACTA METALLURGICA, 1974, 22 (10) :1205-1214
[3]  
CVETKOVIC DM, 1998, SPECTRA GRAPHS THEOR, P38
[4]   Systematic prediction of kinetically limited crystal growth morphologies [J].
Du, DX ;
Srolovitz, DJ ;
Coltrin, ME ;
Mitchell, CC .
PHYSICAL REVIEW LETTERS, 2005, 95 (15)
[5]  
Frank F. C., 1958, GROWTH PERFECTION CR
[6]  
Gurtin M.E., 1993, Thermomechanics of evolving phase boundaries in the plane Clarendon Press
[7]  
Oxford University Press
[8]   Interface evolution in three dimensions with curvature-dependent energy and surface diffusion: Interface-controlled evolution, phase transitions, epitaxial growth of elastic films [J].
Gurtin, ME ;
Jabbour, ME .
ARCHIVE FOR RATIONAL MECHANICS AND ANALYSIS, 2002, 163 (03) :171-208
[9]   SOME THEOREMS ON THE FREE ENERGIES OF CRYSTAL SURFACES [J].
HERRING, C .
PHYSICAL REVIEW, 1951, 82 (01) :87-93
[10]  
Herring C., 1953, Structure and properties of solid surfaces, P5