Advances in scanning force microscopy for dimensional metrology

被引：112

作者：

Danzebrink, H. -U. ^{[1
]}

Koenders, L.

Wilkening, G.

Yacoot, A.

Kunzmann, H.

机构：

[1] Phys Tech Bundesanstalt Braunschweig & Berlin, Braunschweig, Germany

[2] Natl Phys Lab, Teddington TW11 0LW, Middx, England

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2006年 / 55卷 / 02期

关键词：

scanning probe microscope; dimensional; metrology;

D O I：

10.1016/j.cirp.2006.10.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents the state of the art in scanning force microscopy for dimensional metrology. A detailed description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to improve calibration procedures, traceability, reduce measurement uncertainty, ensure consistancy of measurement and broaden the range of applications are described.

引用

页码：841 / 878

页数：38

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