Nanostructure and composition control of fluorocarbon films from modulated tetrafluoroethylene plasmas

被引：40

作者：

Cicala, G ^{[1
]}

Milella, A ^{[1
]}

Palumbo, F ^{[1
]}

Rossini, P ^{[1
]}

Favia, P ^{[1
]}

d'Agostino, R ^{[1
]}

机构：

[1] Univ Bari, Dipartimento Chim, Sez BARI, CNR,Ist Metodol Inorgan & Plasmi, I-70126 Bari, Italy

来源：

MACROMOLECULES | 2002年 / 35卷 / 24期

关键词：

D O I：

10.1021/ma025536e

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：8920 / 8922

页数：3

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