Structure and properties of sequentially sputtered molybdenum-tin films

被引：12

作者：

Dahn, JR ^{[1
]}

Turner, RL

Mao, O

Dunlap, RA

George, AE

Buckett, MM

McClure, DJ

Krause, LJ

机构：

[1] Dalhousie Univ, Dept Phys, Halifax, NS B3H 3J5, Canada

[2] Dalhousie Univ, Dept Chem, Halifax, NS B3H 3J5, Canada

[3] 3M Co, St Paul, MN 55144 USA

来源：

THIN SOLID FILMS | 2002年 / 408卷 / 1-2期

基金：

加拿大自然科学与工程研究理事会;

关键词：

molybdenum; multilayers; tin;

D O I：

10.1016/S0040-6090(02)00121-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Rotating a water-cooled substrate rapidly under Mo and Sn sputter sources made sequentially sputtered molybdenum-tin thin films. The layer thickness deposited during each circuit under each source was selected between 2 and 20 Angstrom and films of several micrometers overall thickness were prepared. The produced films were characterized using wide-angle and small-angle X-ray scattering, Sn-119 Mossbauer spectroscopy. differential scanning calorimetry and transmission electron microscopy. Films of three major types are observed: (1) homogeneous crystalline body centered cubic Mo1-xSnx is produced when x is less than approximately 0.45 and when the layer thickness deposited in each pass under the targets is small: (2) nanocrystalline BCC Mo1-xSnx having x approximately equal to 0.45 coexisting with nanocrystalline tin when the overall tin content is greater than 45% atomic and the layer thickness deposited in each pass under the targets is smalls and (3) lamina of composition modulated Mo1-xSnx disturbed by nanoscopic clusters of tin when the overall tin content is greater than approximately 40% atomic and the layer thickness of Mo deposited in each pass is greater than approximately 6 Angstrom. This is the first report of BCC Mo1-xSnx for 0less than or equal toxless than or equal to0.45. A 'phase diagram' of the observed film types is presented. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：111 / 122

页数：12

共 17 条

[11] Mechanically alloyed Sn-Fe(-C) powders as anode materials for Li-ion batteries -: III.: Sn2Fe:SnFe3C active/inactive composites
Mao, O
Dahn, JR
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (02) : 423 - 427
[12] Active/inactive nanocomposites as anodes for Li-ion batteries
Mao, O
Turner, RL
Courtney, IA
Fredericksen, BD
Buckett, MI
Krause, LJ
Dahn, JR
[J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 1999, 2 (01) : 3 - 5
[13] MOFFAT WG, 1990, HDB BNARY PHASE DIAG
[14] TURNER RL, 1999, Patent No. 9949532
[15] TURNER RL, UNPUB ELECTROCHEMICA
[16] Warren B.E., 1990, X-ray Diffraction
[17] Small particle size multiphase Li-alloy anodes for lithium-ion-batteries
Yang, J
Winter, M
Besenhard, JO
[J]. SOLID STATE IONICS, 1996, 90 (1-4) : 281 - 287

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