Micromachining and material change characterization using femtosecond laser oscillators

被引：5

作者：

Schaffer, CB ^{[1
]}

Au, JAD ^{[1
]}

Mazur, E ^{[1
]}

Squier, JA ^{[1
]}

机构：

[1] Univ Calif San Diego, Dept Chem & Biochem, La Jolla, CA 92093 USA

来源：

COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST AND FREE-ELECTRON LASERS | 2002年 / 4633卷

关键词：

third harmonic generation; nonlinear microscopy; laser-induced breakdown; laser-induced damage; waveguide writing; laser micromachining;

D O I：

10.1117/12.461370

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

We use third harmonic generation (THG) microscopy to image waveguides and single-shot structural modifications produced in bulk glass using femtosecond laser pulses. THG microscopy reveals the internal structure of waveguides written with a femtosecond laser oscillator, and gives a three-dimensional view of the complicated morphology of the structural changes produced with single, above-threshold femtosecond pulses. We find that THG microscopy is as sensitive to refractive index change as differential interference contrast microscopy, while also offering the three-dimensional sectioning capabilities of a nonlinear microscopy technique. It is now possible to micromachine three-dimensional optical devices and to image these structures in three dimensions, all with a single femtosecond laser oscillator.

引用

页码：112 / 118

页数：7

共 31 条

[1]

Aus der Au J., 2000, OPT LETT, V25, P859

[2] Nonlinear scanning laser microscopy by third harmonic generation [J].

Barad, Y ;

Eisenberg, H ;

Horowitz, M ;

Silberberg, Y .

APPLIED PHYSICS LETTERS, 1997, 70 (08) :922-924

[3]

Boyd R. W., 2003, NONLINEAR OPTICS

[4] Structural changes in fused silica after exposure to focused femtosecond laser pulses [J].

Chan, JW ;

Huser, T ;

Risbud, S ;

Krol, DM .

OPTICS LETTERS, 2001, 26 (21) :1726-1728

[5] Low-repetition-rate high-peak-power Kerr-lens mode-locked Ti:Al2O3 laser with a multiple-pass cavity [J].

Cho, SH ;

Bouma, BE ;

Ippen, EP ;

Fujimoto, JG .

OPTICS LETTERS, 1999, 24 (06) :417-419

[6] Generation of 90-nJ pulses with a 4-MHz repetition-rate Kerr-lens mode-locked Ti:Al2O3 laser operating with net positive and negative intracavity dispersion [J].

Cho, SH ;

Kärtner, FX ;

Morgner, U ;

Ippen, EP ;

Fujimoto, JG ;

Cunningham, JE ;

Knox, WH .

OPTICS LETTERS, 2001, 26 (08) :560-562

[7] Writing waveguides in glass with a femtosecond laser [J].

Davis, KM ;

Miura, K ;

Sugimoto, N ;

Hirao, K .

OPTICS LETTERS, 1996, 21 (21) :1729-1731

[8] LASER-INDUCED BREAKDOWN BY IMPACT IONIZATION IN SIO2 WITH PULSE WIDTHS FROM 7 NS TO 150 FS [J].

DU, D ;

LIU, X ;

KORN, G ;

SQUIER, J ;

MOUROU, G .

APPLIED PHYSICS LETTERS, 1994, 64 (23) :3071-3073

[9] Waveguide writing in chalcogenide glasses by a train of femtosecond laser pulses [J].

Efimov, OM ;

Glebov, LB ;

Richardson, KA ;

Van Stryland, E ;

Cardinal, T ;

Park, SH ;

Couzi, M ;

Brunéel, JL .

OPTICAL MATERIALS, 2001, 17 (03) :379-386

[10] Fiber lasers in ultrafast optics [J].

Fermann, ME ;

Sucha, G ;

Galvanauskas, A ;

Hofer, M ;

Harter, D .

COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS, 1999, 3616 :14-24

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