Characterization and optimization of scan speed for tapping-mode atomic force microscopy

被引:106
作者
Sulchek, T [1 ]
Yaralioglu, GG
Quate, CF
Minne, SC
机构
[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA
[2] NanoDevices, Santa Barbara, CA 93103 USA
关键词
D O I
10.1063/1.1488679
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Increasing the imaging speed of tapping mode atomic force microscopy (AFM) has important practical and scientific applications. The scan speed of tapping-mode AFMs is limited by the speed of the feedback loop that maintains a constant tapping amplitude. This article seeks to illuminate these limits to scanning speed. The limits to the feedback loop are: (1) slow transient response of probe; (2) instability limitations of high-quality factor (Q) systems; (3) feedback actuator bandwidth; (4) error signal saturation; and the (5) rms-to-dc converter. The article will also suggest solutions to mitigate these limitations. These limitations can be addressed through integrating a faster feedback actuator as well as active control of the dynamics of the cantilever. (C) 2002 American Institute of Physics.
引用
收藏
页码:2928 / 2936
页数:9
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