Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range

被引：51

作者：

Correia, JH ^{[1
]}

Bartek, M ^{[1
]}

Wolffenbuttel, RF ^{[1
]}

机构：

[1] Delft Univ Technol, Lab Elect Instrumentat, DIMES, NL-2628 CD Delft, Netherlands

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 76卷 / 1-3期

关键词：

interferometer; Fabry-Perot; spectrometer; FWHM; finesse;

D O I：

10.1016/S0924-4247(99)00023-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot microinterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 mu m. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors (lambda/10 for the visible part of the spectrum), low control voltages (< 21 V for 450 nm deflection) and simple fabrication. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：191 / 196

页数：6

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