Fabrication of photonic crystals for the visible spectrum by holographic lithography

被引:1609
作者
Campbell, M
Sharp, DN
Harrison, MT
Denning, RG
Turberfield, AJ
机构
[1] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England
[2] Univ Oxford, Inorgan Chem Lab, Dept Chem, Oxford OX1 3QR, England
关键词
D O I
10.1038/35003523
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The term 'photonics' describes a technology whereby data transmission and processing occurs largely or entirely by means of photons. photonic crystals are microstructured materials in which the dielectric constant is periodically modulated on a length scale comparable to the desired wavelength of operation. Multiple interference between waves scattered fr om each unit cell of the structure may open a 'photonic bandgap'-a range of frequencies, analogous to the electronic bandgap of a semiconductor, within which no propagating electromagnetic modes exist(1-3). Numerous device principles that exploit this property have been identified(4-8). Considerable progress has now been made in constructing two-dimensional structures using conventional lithography(3), but the fabrication of three-dimensional photonic crystal structures for the visible spectrum remains a considerable challenge. Here we describe a technique-three-dimensional holographic lithography-that is well suited to the production of three-dimensional structures with sub-micrometre periodicity. With this technique we have made microperiodic polymeric structures, and we have used these as templates to create complementary structures with higher refractive-index contrast.
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页码:53 / 56
页数:4
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