Structure of nitrogenated carbon films by electron diffraction and imaging

The change of the microstructure of carbon films after nitrogen incorporation is a topic of extensive discussion. Concerning this topic, tetrahedral amorphous carbon prepared by filtered cathodic are deposition is chosen for present investigations where nitrogen is incorporated in the films by using a Kaufman-type ion source. The average distribution of bonds and bond angles is studied by electron diffraction leading to the radial distribution function. On the other hand: a detailed study on the film microstructure has been carried out in a high-resolution transmission electron microscope. Nanocrystalline structures of nitrogenated carbon are clearly seen, especially, from the films having high nitrogen concentration. The variation of structure of the films with nitrogen concentration is understood from electron energy loss spectra. The bonding arrangement of carbon and nitrogen atoms is thoroughly emphasized from carbon as well as nitrogen K edges. The microscopic view helps us to understand a model of carbon and carbon-nitrogen nanostructures.