A hard x-ray nanoprobe for scanning and projection nanotomography

被引：49

作者：

Bleuet, Pierre ^{[1
,2
]}

Cloetens, Peter ^{[1
]}

Gergaud, Patrice ^{[2
]}

Mariolle, Denis ^{[2
]}

Chevalier, Nicolas ^{[2
]}

Tucoulou, Remi ^{[1
]}

Susini, Jean ^{[1
]}

Chabli, Amal ^{[2
]}

机构：

[1] European Synchrotron Radiat Facil, F-38043 Grenoble, France

[2] MINATEC, LETI, CEA, F-38054 Grenoble, France

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2009年 / 80卷 / 05期

关键词：

computerised tomography; nanotechnology; X-ray microscopy; ELEMENTAL MICROANALYSIS; TOMOGRAPHY; MICROSCOPY; CELLS; FLUORESCENCE; SPECTROSCOPY;

D O I：

10.1063/1.3117489

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

To fabricate and qualify nanodevices, characterization tools must be developed to provide a large panel of information over spatial scales spanning from the millimeter down to the nanometer. Synchrotron x-ray-based tomography techniques are getting increasing interest since they can provide fully three-dimensional (3D) images of morphology, elemental distribution, and crystallinity of a sample. Here we show that by combining suitable scanning schemes together with high brilliance x-ray nanobeams, such multispectral 3D volumes can be obtained during a single analysis in a very efficient and nondestructive way. We also show that, unlike other techniques, hard x-ray nanotomography allows reconstructing the elemental distribution over a wide range of atomic number and offers truly depth resolution capabilities. The sensitivity, 3D resolution, and complementarity of our approach make hard x-ray nanotomography an essential characterization tool for a large panel of scientific domains.

引用

页数：3

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