Heat transport in dielectric thin films and at solid-solid interfaces

被引:57
作者
Cahill, DG
机构
[1] Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign, Urbana, IL
来源
MICROSCALE THERMOPHYSICAL ENGINEERING | 1997年 / 1卷 / 02期
关键词
D O I
10.1080/108939597200296
中图分类号
O414.1 [热力学];
学科分类号
摘要
Experimental and theoretical studies of heat transport by lattice vibrations in thin film materials are reviewed. Selected examples of experimental methods are discussed to illustrate the wide variety of methods that have been developed for thin film measurements. Dielectric thin films are typically deposited at relatively low temperatures and therefore have significant atomic-scale disorder; thin fan studies are placed in the context of the more general study of heat transport in strongly disordered materials. The finite thermal conductance of solid-solid interfaces reduces the effective thermal conductivity of ultrathin dielectric films and semiconductor superlattices.
引用
收藏
页码:85 / 109
页数:25
相关论文
共 34 条
[1]   THERMAL-CONDUCTIVITY OF DISORDERED HARMONIC SOLIDS [J].
ALLEN, PB ;
FELDMAN, JL .
PHYSICAL REVIEW B, 1993, 48 (17) :12581-12588
[2]  
Angstrom A.J., 1861, ANN PHYS, V114, P513
[3]   WIDE-FREQUENCY SPECIFIC-HEAT SPECTROMETER [J].
BIRGE, NO ;
NAGEL, SR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (08) :1464-1470
[4]  
Cahill D.G., 1990, Thermal Conductivity 21, P3
[5]   THERMAL-CONDUCTIVITY OF SPUTTERED AND EVAPORATED SIO2 AND TIO2 OPTICAL COATINGS [J].
CAHILL, DG ;
ALLEN, TH .
APPLIED PHYSICS LETTERS, 1994, 65 (03) :309-311
[6]   THERMAL-CONDUCTIVITY OF ALPHA-SIH THIN-FILMS [J].
CAHILL, DG ;
KATIYAR, M ;
ABELSON, JR .
PHYSICAL REVIEW B, 1994, 50 (09) :6077-6081
[7]   THERMAL-CONDUCTIVITY MEASUREMENT FROM 30-K TO 750-K - THE 3-OMEGA METHOD [J].
CAHILL, DG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (02) :802-808
[8]   LOWER LIMIT TO THE THERMAL-CONDUCTIVITY OF DISORDERED CRYSTALS [J].
CAHILL, DG ;
WATSON, SK ;
POHL, RO .
PHYSICAL REVIEW B, 1992, 46 (10) :6131-6140
[9]  
Carslaw H. S., 1959, CONDUCTION HEAT SOLI
[10]   THERMAL-CONDUCTIVITIES OF QUANTUM-WELL STRUCTURES [J].
CHEN, G ;
TIEN, CL .
JOURNAL OF THERMOPHYSICS AND HEAT TRANSFER, 1993, 7 (02) :311-318