THERMAL-CONDUCTIVITY OF SPUTTERED AND EVAPORATED SIO2 AND TIO2 OPTICAL COATINGS

被引：143

作者：

CAHILL, DG

ALLEN, TH

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] OCLI,SANTA ROSA,CA 95407

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 03期

关键词：

D O I：

10.1063/1.112355

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thermal conductivity of SiO2 and TiO2 optical coatings are measured in the temperature range 80-400 K. For SiO2, the thermal conductivity of sputtered and evaporated films are 77% and 55% of the bulk value, respectively, independent of temperature. Similarly, the thermal conductivity of evaporated TiO2 is 63% of the conductivity of sputtered TiO2.

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页码：309 / 311

页数：3

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