Single crystal laser patterning for selective YBa2Cu3O7-x growth

被引:8
作者
Aguiar, R
Sanchez, F
Varela, M
机构
[1] Dept. de Fis. Apl. i Electronica, Universitat de Barcelona, E-08028 Barcelona
关键词
D O I
10.1016/0169-4332(95)00494-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The effect of laser irradiation on single crystals which are widely used for YBa2Cu3O7-x (YBCO) deposition is studied, in order to determine the feasibility of selective growth on laser patterned substrates as an alternative to YBCO patterning. Excimer laser radiation (KrF, ArF) was used to pattern YSZ(100), LaAlO3(100) and SrTiO3(100), single crystals with fluences ranging from 0.05 to 20 J cm(-2) using different number of pulses and pulse repetition rates (0.5-40 Hz). Down to 10 mu m wide bridges were obtained by mask projection in order to study pattern definition on each material. Optimal parameters depend strongly on the material due to their different physical properties, leading to clean patterns surrounded by different kinds of locally induced damage.
引用
收藏
页码:405 / 409
页数:5
相关论文
共 6 条
[1]  
AGUIAR R, 1995, MATER SCI TECH SER, V11, P46, DOI 10.1179/026708395790182445
[2]   LASER ABLATION STUDIES OF MAGNESIUM-OXIDE [J].
DIRNBERGER, L ;
DYER, PE ;
FARRAR, S ;
KEY, PH ;
MONK, P .
APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :216-220
[3]   PHENOMENOLOGICAL INTERPRETATION OF EXCIMER-LASER ABLATION OF SINGLE-CRYSTAL OXIDES (MGO, SRTIO3 AND LAALO3) [J].
ISHIBASHI, H ;
ARISAKA, S ;
KINOSHITA, K ;
KOBAYASHI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (9A) :4971-4977
[4]  
IYE Y, 1992, PHYSICAL PROPERTIES, P285
[5]   INTERACTIONS OF WIDE BAND-GAP SINGLE-CRYSTALS WITH 248 NM EXCIMER-LASER RADIATION .1. MGO [J].
WEBB, RL ;
JENSEN, LC ;
LANGFORD, SC ;
DICKINSON, JT .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) :2323-2337
[6]   INTERACTIONS OF WIDE BAND-GAP SINGLE-CRYSTALS WITH 248 NM EXCIMER-LASER RADIATION .2. NACL [J].
WEBB, RL ;
JENSEN, LC ;
LANGFORD, SC ;
DICKINSON, JT .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) :2338-2346