LASER ABLATION STUDIES OF MAGNESIUM-OXIDE

被引:22
作者
DIRNBERGER, L
DYER, PE
FARRAR, S
KEY, PH
MONK, P
机构
[1] Department of Applied Physics, University of Hull, Hull
关键词
D O I
10.1016/0169-4332(93)90507-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The ablation of single crystal magnesium oxide using a UV-excimer KrF laser at 248 nm has been studied using a variety of diagnostic techniques. Ablation depth rate measurements indicate a threshold fluence for significant material removal of approximately 3 J cm-2 although surface damage in the form of micro-cracks is observed below this value. The effective absorption coefficient at 248 nm of 4 X 10(4) cm-1, found from the ablation rate, was much greater than observed from small signal transmission measurements. Scanning electron microscopy reveals evidence of thermal removal in the ablation regime probably mediated by a breakdown plasma, and a degree of exfoliation below the ablation threshold. The velocity of selected ablation species has been determined from time-resolved emission spectroscopy and a charge collector probe used to measure the angular distribution of ions in the ablation plume.
引用
收藏
页码:216 / 220
页数:5
相关论文
共 6 条
  • [1] THIN-FILM DEPOSITION OF DIELECTRIC OXIDES BY LASER ABLATION
    AMIRHAGHI, S
    ARCHER, A
    TAGUIANG, B
    MCMINN, R
    BARNES, P
    TARLING, S
    BOYD, IW
    [J]. APPLIED SURFACE SCIENCE, 1992, 54 : 205 - 209
  • [2] ROLE OF CRACKS, PORES, AND ABSORBING INCLUSIONS ON LASER-INDUCED DAMAGE THRESHOLD AT SURFACES OF TRANSPARENT DIELECTRICS
    BLOEMBERGEN, N
    [J]. APPLIED OPTICS, 1973, 12 (04) : 661 - 664
  • [3] EPITAXIAL MGO ON SI(001) FOR Y-BA-CU-O THIN-FILM GROWTH BY PULSED LASER DEPOSITION
    FORK, DK
    PONCE, FA
    TRAMONTANA, JC
    GEBALLE, TH
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (20) : 2294 - 2296
  • [4] CERAMIC LAYER EPITAXY BY PULSED LASER DEPOSITION IN AN ULTRAHIGH-VACUUM SYSTEM
    KOINUMA, H
    NAGATA, H
    TSUKAHARA, T
    GONDA, S
    YOSHIMOTO, M
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (18) : 2027 - 2029
  • [5] PUELL H, 1970, Z NATURFORSCH PT A, VA 25, P1807
  • [6] DEPOSITION OF OPTICAL THIN-FILMS BY PULSED LASER ASSISTED EVAPORATION
    SANKUR, HO
    GUNNING, W
    [J]. APPLIED OPTICS, 1989, 28 (14): : 2806 - 2808