Production and visualization of quaternary combinatorial thin films

被引：25

作者：

Chevrier, V. ^{[1
]}

Dahn, J. R. ^{[1
]}

机构：

[1] Dalhousie Univ, Dept Phys & Atmospher Sci, Halifax, NS B3H 3J5, Canada

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2006年 / 17卷 / 06期

关键词：

quaternary; continuous composition spread; combinatorial thin film; sputtering; visualization software; x-ray diffraction;

D O I：

10.1088/0957-0233/17/6/017

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new method for the production of four-component (element or compound) combinatorial thin films is presented. The combinatorial thin film consists of nine continuous four-component regions producing planes in quaternary composition space. The method allows for the coverage of large continuous regions of quaternary or pseudoquaternary systems. The magnetron sputtering deposition method is mechanically simple and uses existing infrastructure. New software for the visualization of quaternary data is also presented. This software allows the straightforward identification of composition-dependent properties such as x-ray diffraction intensities. The new production method and software are demonstrated with a four-element combinatorial thin film containing Si, Sn, Co and C.

引用

页码：1399 / 1404

页数：6

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