Synthesis of precursors for chemical solution deposition of PZT thin films

Lead zirconate titanate precursors involved in the sol-gel synthesis of PZT thin films were prepared from alkoxides of Pb, Zr and Ti, with the same alcoholic radical (methoxyethoxide), obtained by dehydration and alcoholysis of lead acetate, and by alcoholic exchange of zirconium n-propoxide and titanium ethoxide. In this investigation, H-1 and C-13 NMR spectroscopic techniques and FTIR analysis have been used to study the reaction mechanisms and identify the compounds obtained. The titanium and zirconium precursors present a complete alkoxy group exchange, whereas lead acetate is partially alkoxylated. A precursor solution of PZT has been obtained with minimal quantity of acetate groups and residual water. The molecular structures for the Zr, Ti, and Pb precursors and for the PZT precursor have been proposed. (C) 1999 Elsevier Science S.A. All rights reserved.