Improved surface chemistries, thin film deposition techniques, and stamp designs for nanotransfer printing

被引:100
作者
Menard, E
Bilhaut, L
Zaumseil, J
Rogers, JA [1 ]
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Dept Chem, Beckman Inst, Urbana, IL 61801 USA
[2] Univ Illinois, Dept Mat Sci & Engn, Dept Chem, Seitz Mat Res Lab, Urbana, IL 61801 USA
[3] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
关键词
D O I
10.1021/la048827k
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Nanotransfer printing represents an additive approach for patterning thin layers of solid materials with nanometer resolution. The surface chemistries, thin film deposition techniques, and stamp designs are all important for the proper operation of this method. This paper presents some details concerning processing procedures and other considerations needed for patterning two- and three-dimensional nanostructures with low density of defects and minimal distortions.
引用
收藏
页码:6871 / 6878
页数:8
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