Normal and torsional spring constants of atomic force microscope cantilevers

Two methods commonly used to measure the normal spring constants of atomic force microscope cantilevers are the added mass method of Cleveland [J. P. Cleveland , Rev. Sci. Instrum. 64, 403 (1993)], and the unloaded resonance technique of Sader [J. E. Sader, J. W. M. Chon, and P. Mulvaney, Rev. Sci. Instrum. 70, 3967 (1999)]. The added mass method involves measuring the change in resonant frequency of the fundamental mode of vibration upon the addition of known masses to the free end of the cantilever. In contrast, the unloaded resonance technique requires measurement of the unloaded resonant frequency and quality factor of the fundamental mode of vibration, as well as knowledge of the plan view dimensions of the cantilever and properties of the fluid. In many applications, such as frictional force microscopy, the torsional spring constant is often required. Consequently, in this article, we extend both of these techniques to allow simultaneous calibration of both the normal and torsional spring constants. We also investigate the validity and applicability of the unloaded resonance method when a mass is attached to the free end of the cantilever due to its importance in practice. (C) 2004 American Institute of Physics.