Ultrasensitive ozone detection using single-walled carbon nanotube networks

被引:33
作者
Wongwiriyapan, Winadda
Honda, Shin-Ichi
Konishi, Hirofurni
Mizuta, Tonloaki
Ikuno, Takashi
Ohmori, Takafumi
Ito, Tatsuya
Shimazaki, Ryotaro
Maekawa, Toru
Suzuki, Kengo
Ishikawa, Hiroshi
Oura, Kenjiro
Katayama, Mitsuhiro
机构
[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan
[2] New Cosmos Elect Co Ltd, Yodogawa Ku, Osaka 5320036, Japan
[3] Osaka Univ, Res Ctr Ultralight Voltagr Electron Microscopy, Ibaraki, Osaka 5670047, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 4B期
关键词
single-walled carbon nanotube; gas sensor; ozone; chemical vapor deposition; electrical breakdown;
D O I
10.1143/JJAP.45.3669
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrated ultrasensitive detection of ozone using single-walled carbon nanotube (SWNT) networks directly grown on a conventional sensor substrate. Ozone was detected clown to the ppb level (similar to 6ppb) at room-temperature operation with a fast response. Using an electrical breakdown technique, gas sensitivity was improved. This result clearly indicates that owing to its high sensitivity, simplicity in fabrication and compact size, an SWNT sensor provides a feasible route to ultrasensitive ozone detection surpassing existing methods.
引用
收藏
页码:3669 / 3671
页数:3
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