A flexible perforated microelectrode array probe for action potential recording in nerve and muscle tissues

Flexible perforated microelectrode arrays probes for the simultaneous recording of electrophysiological activity between cells have been manufactured using photolithographic thin film techniques. Polyimide was used as the substrate. Gold was used as the active metal with titanium to adhere the gold to the substrate. A coating of silicon nitride improves the electrode isolation. Perforations in the substrate ensure the position of the electrode in tissue and improve the stability of recording during movement. These electrodes were used for extracellular recording in nerve and muscle tissues. The use of a flexible substrate alleviates the mechanical problems associated with local damage caused by rigid substrates during movement. (C) 1997 Elsevier Science B.V.