Modelling and analysis of a magnetic microactuator

This paper describes the operation of a magnetic microactuator. A prototype device consisting of a Nd-Fe-B permanent magnet, a silicon membrane and an electroplated copper coil is used to verify models and to predict the deflection of the magnetic microactuator. The analysis of this device involves the investigation of its electromagnetic and mechanical behaviour using analytical methods and finite element analysis (FEA). A design procedure for a magnetic microactuator is also outlined. The prototype device was characterised and the measured results compared to the theoretical data. Results show that the deflection of the device may be predicted to an accuracy of 20%. (C) 2000 Elsevier Science S.A. All rights reserved.