Novel optical distance sensor based on MSM technology

被引：14

作者：

Gulden, PG ^{[1
]}

Becker, D

Vossiek, M

机构：

[1] Siemens corp Technol, Corp Technol Dept, D-81730 Munich, Germany

[2] Tech Univ Clausthal, Inst Elektr Informat Tech, Clausthal Zellerfeld, Germany

来源：

IEEE SENSORS JOURNAL | 2004年 / 4卷 / 05期

关键词：

electrooptical mixer; metal-semiconductor-metal technology (MSM); optical intensity-modulation (IM) time-of-flight (TOF) distance measurement; photonic mixing device (PMD);

D O I：

10.1109/JSEN.2004.833151

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a novel distance-sensor concept based on photodiodes in metal-semiconductor-metal technology (MSM). MSM photodiodes can be operated as electrooptical mixers functioning similar to the so-called photonic mixing device (PMD). This paper employs the correlation techniques previously used with the PMD to the MSM. First, experimental results obtained with the MSM inserted into the authors' standard laboratory setup are provided. Additionally, different configurations well suited for mixer operation of the MSM are pointed out. Throughout this paper, similarities between the PMD and MSM are pointed out, as well as key differences.

引用

页码：612 / 618

页数：7

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