Polyurethane rubber all-polymer artificial hair cell sensor

被引:81
作者
Engel, Jonathan M. [1 ]
Chen, Jack
Liu, Chang
Bullen, David
机构
[1] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
artificial hair cell (AHC); biomimetic; force sensitive resistor (FSR); polymer;
D O I
10.1109/JMEMS.2006.879373
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present the design, fabrication process, and preliminary testing results of an artificial hair cell (AHC) sensor made entirely of polymer materials from the substrate level up. The new AHC sensor utilizes polyurethane elastomers for sensing and structures. The AHC can detect two-axis deflection of a vertical polyurethane hair using carbon-impregnated polyurethane force sensitive resistors (FSRs). AHC with cylindrical hair cross-section exhibit sensitivity of 245 ppm resistance change for every micron (ppm/mu m) of tip deflection. The AHC threshold detection level of 3 mu m compares favorably with insect tactile hair cells having thresholds on the order of 30-50 mu m. Furthermore, we have characterized the mechanical and chemical properties of two-part room-temperature-curing polyurethane elastomers; in the context of microfabrication. Elastic properties, chemical resistance, thermal oxidative decomposition, and adhesion properties are tested and compared to the performance of polydimethylsiloxane (PDMS), a widely used elastomeric material. Polyurethane elastomer exhibit superior mechanical tear resistance and ability to adhere to substrates compared to PDMS.
引用
收藏
页码:729 / 736
页数:8
相关论文
共 18 条
[1]   Arthropod touch reception: Spider hair sensilla as rapid touch detectors [J].
Albert J. ;
Friedrich O. ;
Dechant H.-E. ;
Barth F. .
Journal of Comparative Physiology A, 2001, 187 (4) :303-312
[2]  
[Anonymous], 2003, SENSORS SENSING BIOL
[3]  
ARMANI D, 1999, UNPUB IEEE INT C MEM
[4]   DYNAMICS OF ARTHROPOD FILIFORM HAIRS .2. MECHANICAL-PROPERTIES OF SPIDER TRICHOBOTHRIA (CUPIENNIUS-SALEI KEYS) [J].
BARTH, FG ;
WASTL, U ;
HUMPHREY, JAC ;
DEVARAKONDA, R .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY B-BIOLOGICAL SCIENCES, 1993, 340 (1294) :445-461
[5]   Spider mechanoreceptors [J].
Barth, FG .
CURRENT OPINION IN NEUROBIOLOGY, 2004, 14 (04) :415-422
[6]   PHOTOCURABLE POLYMERS APPLIED AS ENCAPSULATING MATERIALS FOR ISFET PRODUCTION [J].
BRATOV, A ;
MUNOZ, J ;
DOMINGUEZ, C ;
BARTROLI, J .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) :823-825
[7]  
CAMPOLO D, UNPUB IEEE C NAN
[8]  
CHEN J, 2004, UNPUB 3D OUT PLANE F
[9]  
CHEN J, 2003, UNPUB DEV POLYM BASE
[10]   Smart skins: Information processing by lateral line flow sensors [J].
Coombs, S .
AUTONOMOUS ROBOTS, 2001, 11 (03) :255-261