Interdigitated humidity sensors for a portable clinical microsystem

被引：35

作者：

Laville, C ^{[1
]}

Pellet, C ^{[1
]}

机构：

[1] Univ Bordeaux 1, Lab 39, 351 Cours Liberat, F-33405 Talence, France

来源：

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING | 2002年 / 49卷 / 10期

关键词：

capacitive humidity sensors; medical microsystem; static and dynamic measurements;

D O I：

10.1109/TBME.2002.802052

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper presents and compares two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. A polyimide-sensitive layer covers the first structures and the optimized ones include a benzocyclobutene-sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption, which are very small (inferior to 500 ms). Next, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. Suitability of optimized sensors for our application is discussed: new structures allow us to increase sensitivity and decrease response time. When the structure is maintained at 40 degreesC by its heater, the response time is 200 ms and the total desorption time is 11 s.

引用

页码：1162 / 1167

页数：6

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