Spatial distributions of absolute densities of argon metastable state 3p54s in a Gaseous Electronics Conference Reference Cell

被引：11

作者：

Augustyniak, E ^{[1
]}

Filimonov, S ^{[1
]}

Borysow, J ^{[1
]}

机构：

[1] Michigan Technol Univ, Dept Phys, Houghton, MI 49931 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 86卷 / 09期

关键词：

D O I：

10.1063/1.371441

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The spatial distributions of the 3p(5)4s metastable state of Ar have been measured in radio frequency argon plasmas in a Gaseous Electronics Conference Reference Cell by means of high resolution absorption spectroscopy. A single-mode, tunable diode laser has been used to obtain absorption profiles at 750 and 801 nm. Spatial profiles across the gap between electrodes have been measured with 1 mm resolution for various pressures (0.15-1.0 Torr) and plasma powers (1-320 W). The densities of 3p(5)4s metastable were obtained from integrated absorption profiles. (C) 1999 American Institute of Physics. [S0021-8979(99)00121-8].

引用

页码：4767 / 4771

页数：5

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