Thermal-flow technique for reducing surface roughness and controlling gap size in polymer microring resonators

Q factors of microring resonator waveguide devices are primarily limited by the surface-roughness-induced scattering loss. Such surface roughness loss has been observed in waveguides that are fabricated from various types of materials, including semiconductors, dielectrics, and polymers. In this letter, we show that the surface roughness of polymer waveguides can be greatly reduced by a thermal-flow technique, and the effective reduction in waveguide loss was verified experimentally. In addition to smoothing surfaces, this technique can simultaneously shrink the gap distance in the coupling region of polymer microring resonators. This, in turn, provides higher coupling, lessens the difficulty of fabricating submicron gaps, and leads to more compact devices. (C) 2004 American Institute of Physics.