Crystallographic characterization of In2O3 films deposited by spray pyrolysis

被引：44

作者：

Korotcenkov, G

Brinzari, V

Cerneavschi, A

Cornet, A

Morante, J

Cabot, A

Arbiol, J

机构：

[1] Tech Univ Moldova, Microelect Lab, Kishinev 168 2004, Moldova

[2] Univ Barcelona, Dept Elect, E-08007 Barcelona, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2002年 / 84卷 / 01期

关键词：

In2O3; spray pyrolysis; film; structure; characterization;

D O I：

10.1016/S0925-4005(02)00008-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Results of a detailed structural characterization of In2O3 films, deposited by spray pyrolysis from InCl3-water solutions, are presented in this paper. The influence of technological parameters such as precursor concentration in sprayed solution, pyrolysis temperature, and film thickness on morphology, crystallite sizes, texturing, and strains were analyzed. SEM, TEM, XRD, AFM, HRTEM, and laser ellipsometry methods were applied for these purposes. An explanation of observed regularities is also given. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：37 / 42

页数：6

共 12 条

[1] Investigation on ozone-sensitive In2O3 thin films [J].