Fabrication of a diffusion cooled superconducting hot electron bolometer for THz mixing applications

被引：17

作者：

Bumble, B

LeDuc, HG

机构：

[1] Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1997年 / 7卷 / 02期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1109/77.622167

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent interest in bolometers for heterodyne mixing applications has prompted development of microbridges which are small enough to allow electron diffusion to dominate over electron-phonon interaction as a cooling mechanism. Prior results at 533 GHz have demonstrated several GHz intermediate frequency (IF) bandwidth. Here we describe our processing method in which the bolometer element is a 10 nm thin film of niobium defined by electron beam lithography down to dimensions of 80 nm. This microbridge is embedded in a normal metal (Au) antenna structure for 1.2 and 2.5 THz applications.

引用

页码：3560 / 3563

页数：4

共 5 条

[1] Length scaling of bandwidth and noise in hot-electron superconducting mixers
Burke, PJ
Schoelkopf, RJ
Prober, DE
Skalare, A
McGrath, WR
Bumble, B
LeDuc, HG
[J]. APPLIED PHYSICS LETTERS, 1996, 68 (23) : 3344 - 3346
[2] MACKIE S, 1985, SOLID STATE TECHNOL, V28, P117
[3] SUPERCONDUCTING TERAHERTZ MIXER USING A TRANSITION-EDGE MICROBOLOMETER
PROBER, DE
[J]. APPLIED PHYSICS LETTERS, 1993, 62 (17) : 2119 - 2121
[4] ROOKS M, 1987, J VAC SCI TECHNOL B, V5
[5] Large bandwidth and low noise in a diffusion-cooled hot-electron bolometer mixer
Skalare, A
McGrath, WR
Bumble, B
LeDuc, HG
Burke, PJ
Verheijen, AA
Schoelkopf, RJ
Prober, DE
[J]. APPLIED PHYSICS LETTERS, 1996, 68 (11) : 1558 - 1560

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