Micro-mechanical slit positioning system as a transmissive spatial light modulator

Micro-slits have been prepared with a slit-width and a slit-length of 2 ... 1000 mum. Linear and two-dimensional arrays up to 10 x 110 slits have been developed and completed with a piezo-actuator for shifting. This system is a so-called mechanical slit positioning system. The light is switched by simple one- or two-dimensional displacement of coded slit masks in a one- or two-layer architecture. The slit positioning system belongs to the transmissive class of MEMS based spatial light modulators (SLM). It has fundamental advantages for optical contrast and also can be used in the full spectral region. Therefore transmissive versions of SLM should be a future solution. Instrument architectures based on the slit positioning system can increase the resolution by subpixel generation, the throughput by HADAMARD transform mode, or select objects for multi-object-spectroscopy. The linear slit positioning system was space qualified within an advanced n-spectro-spectrometer. A NIR multi-object-spectrometer for the Next Generation Space Telescope (NGST) is based on a field selector for selecting objects. The field selector is a SLM, which could be implemented by a slit positioning system.