Initial stages of nanocrystal growth of compound semiconductors on Si substrates

被引:15
作者
Oshima, M
Watanabe, Y
Heun, S
Sugiyama, M
Kiyokura, T
机构
[1] NTT Interdisciplinary Research Labs., Musashino-shi
关键词
D O I
10.1016/0368-2048(96)02939-8
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
we grew compound semiconductor nanocrystals on passivated Si surfaces, which were characterized by photoelectron spectroscopy and RHEED (reflection high energy electron diffraction). The Ga-deposited Si(111) surface with a 1x1 RHEED pattern was significantly converted into GaSb nanocrystals by Sb beam irradiation at 500 degrees C. In order to grow better quality GaSb nanocrystals, Se-terminated Si surfaces were employed, and about 20 nm uniform GaSb nanocrystals were grown, whose crystallinity of good quality was verified by cross-sectional TEM. For InAs nanocrystals, hydrogen-terminated Si surfaces are suitable for growth at as low substrate temperature as 300 degrees C.
引用
收藏
页码:129 / 132
页数:4
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