Effect of bismuth excess on the crystallization of Bi3.25La0.75Ti3O12 thin films on Pt/Ti/SiO2/Si substrates

被引:17
作者
Kim, KT [1 ]
Kim, CI [1 ]
机构
[1] Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea
关键词
BLT; thin film; MOD; FeRAM; ferroelectric properties;
D O I
10.1016/j.mee.2004.01.034
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Bismuth lanthanum titanate (BLT) thin films with excess Bi contents wore prepared onto a Pt/Ti/SiO2/Si substrate by a metalorganic decomposition technique (MOD). The effect of Bi excess on the microstructure and ferroelectric properties was investigated. When a 10% of Bi excess was added, the BLT thin films showed a polycrystalline structure. The remanent polarization and dielectric constant decreased with more than 10% of Bi excess, Bi deficiency or Bi excess over 10% in the BLT films resulted in poor fatigue properties. This was attributed to the structure defects and a presence of a secondary phase, which coexists with a layered perovskite phase. The BLT thin films with 10% of Bi excess have the remanent polarization (2P(r)) value of 25.66 muC/cm(2) and a coercive field of 84.75 kV/cm. The BLT thin films with 10% of Bi excess showed no fatigue even after 1 x 10(9) bipolar switching cycles. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:266 / 271
页数:6
相关论文
共 16 条
[1]   Can lead nonstoichiometry influence ferroelectric properties of Pb(Zr,Ti)O3 thin films? [J].
Aggarwal, S ;
Madhukar, S ;
Nagaraj, B ;
Jenkins, IG ;
Ramesh, R ;
Boyer, L ;
Evans, JT .
APPLIED PHYSICS LETTERS, 1999, 75 (05) :716-718
[2]  
BU SD, 2000, J KOREAN PHYS SOC, V9, P36
[3]   ELECTRICAL AND OPTICAL PROPERTIES OF FERROELECTRIC BI4TI3O12 SINGLE CRYSTALS [J].
CUMMINS, SE ;
CROSS, LE .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (05) :2268-&
[4]   Photoinduced changes in the fatigue behavior of SrBi2Ta2O9 and Pb(Zr,Ti)O-3 thin films [J].
Dimos, D ;
AlShareef, HN ;
Warren, WL ;
Tuttle, BA .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (03) :1682-1687
[5]   Grain-size effect on ferroelectric Pb(Zr1-xTix)O3 solid solutions induced by surface bond contraction -: art. no. 184112 [J].
Huang, HT ;
Sun, CQ ;
Zhang, TS ;
Hing, P .
PHYSICAL REVIEW B, 2001, 63 (18)
[6]   Electrical properties of (001)- and (116)-oriented epitaxial SrBi2Ta2O9 thin films prepared by metalorganic chemical vapor deposition [J].
Ishikawa, K ;
Funakubo, H .
APPLIED PHYSICS LETTERS, 1999, 75 (13) :1970-1972
[7]   Effect of oxygen to argon ratio on growth of Bi4Ti3O12 thin films on Ir and IrO2 prepared by radio-frequency magnetron sputtering [J].
Jo, W ;
Cho, SM ;
Lee, HM ;
Kim, DC ;
Bu, JU .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5A) :2827-2830
[8]  
Kumar MM, 2001, J APPL PHYS, V90, P934, DOI 10.1063/1.1383267
[9]   Structural and electrical anisotropy of (001)-, (116)-, and (103)-oriented epitaxial SrBi2Ta2O9 thin films on SrTiO3 substrates grown by pulsed laser deposition [J].
Lee, HN ;
Visinoiu, A ;
Senz, S ;
Harnagea, C ;
Pignolet, A ;
Hesse, D ;
Gösele, U .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (11) :6658-6664
[10]   Lanthanum-substituted bismuth titanate for use in non-volatile memories [J].
Park, BH ;
Kang, BS ;
Bu, SD ;
Noh, TW ;
Lee, J ;
Jo, W .
NATURE, 1999, 401 (6754) :682-684