Design, testing, and simulation of NiTi shape-memory-alloy thin-film-based microgrippers

被引：22

作者：

Huang, WM ^{[1
]}

Tan, JP ^{[1
]}

Gao, XY ^{[1
]}

Yeo, JH ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS | 2003年 / 2卷 / 03期

关键词：

NiTi; shape memory alloys; microgrippers; thin films; sputtering; MEMS; simulation; testing; fabrication;

D O I：

10.1117/1.1585063

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a way to fabricate microgrippers that can meet the industry's needs well, i.e., low cost and large tip deflection, etc. The microgripper is fabricated by bonding two identical micro NiTi-Si cantilever beams together with a silicon spacer in between. It can be actuated by electrical current directly. We have tested the behavior of micro NiTi-Si cantilever beams of three different sizes, and compared that with our simulation results. According to our simulation, the maximum strain and the maximum stress in NiTi should enable the grippers to survive after 10(6) cycles. Due to the simple fabrication process, this design is very suitable for batch production at low cost, which is a significant advantage in both medical and manufacturing industries. (C) 2003 Society of Photo-Optical Instrumentation Engineers.

引用

页码：185 / 190

页数：6

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