A method for precision patterning of silicone elastomer and its applications

被引：55

作者：

Ryu, KS ^{[1
]}

Wang, XF ^{[1
]}

Shaikh, K ^{[1
]}

Liu, C ^{[1
]}

机构：

[1] Univ Illinois, Micro & Nanotechnol Lab, Micro Actuators Sensors & Syst Grp, Urbana, IL 61801 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2004年 / 13卷 / 04期

基金：

美国国家科学基金会;

关键词：

poly(dimethylsiloxane) (PDMS); scanning probe contact printing (SPCP); scanning probe microscopy (SPM) probes;

D O I：

10.1109/JMEMS.2004.832188

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micro-machined membranes with integrated silicone gaskets.

引用

页码：568 / 575

页数：8

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