Comparative role of metal-organic decomposition-derived [100] and [111] in electrical properties of Pb(Zr,Ti)O-3 thin films

被引:31
作者
Chen, SY [1 ]
Chen, IW [1 ]
机构
[1] UNIV MICHIGAN,DEPT MAT SCI & ENGN,ANN ARBOR,MI 48109
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 7A期
关键词
PZT; MOD; texture; dielectric constant; remanent polarization; coercive field;
D O I
10.1143/JJAP.36.4451
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effect of composition (phase), texture, microstructure and thickness on electrical properties of Pb(Zr1-zTiz)O-3 (PZT) films have been evaluated. Zr-rich PZT films with [111] texture have a higher remanent polarization and dielectric constant, but a lower coercive field as compared with PZT[100] films. Ti-rich PZT films with [100] texture have a higher dielectric constant, but a lower remanent polarization and coercive field as compared with PZT[111] films. Near the morphotropic phase boundary (MPB) composition, films with a mixed texture of [111] and [100] have a higher dielectric constant than PZT[100] and PZT[111] films even though the values of remanent polarization and coercive field of the mixed textured films are in between those of the other two films. Both remanent and saturation polarization are independent of film thickness, whereas dielectric constant decreases but coercive field increases at very small thickness.
引用
收藏
页码:4451 / 4458
页数:8
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