Influence of the ferroelectric domain structure and switching properties on the endurance of PZT ferroelectric capacitors

被引：8

作者：

Wouters, DJ

Maes, HE

机构：

来源：

MICROELECTRONICS AND RELIABILITY | 1996年 / 36卷 / 11-12期

关键词：

D O I：

10.1016/0026-2714(96)00193-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Ferroelectric Pt/PZT/Pt capacitors with different PZT orientations are characterized before and after electrical fatigue. (111)(c)-oriented, tetragonal PZT is characterized by abrupt 180 degrees switching and very high-quality hysteresis loops but is very prone to electrical fatigue, while the 90 degrees switching which is dominant in unsaturated and/or unpoled (100)(c) PZT films results in slanted loops with low polarization but high endurance. Copyright (C) 1996 Elsevier Science Ltd

引用

页码：1763 / 1766

页数：4

共 7 条

[1]

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[2]

Ramesh R., 1992, Integrated Ferroelectrics, V1, P1, DOI 10.1080/10584589208215562

[3] PULSE SWITCHING CHARACTERIZATION OF ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITED PBZRXTI1-XO3 THIN-FILMS FOR HIGH-DENSITY MEMORY APPLICATIONS [J].