Elastic constants and structural properties of nanometre-thick diamond-like carbon films

被引:21
作者
Beghi, MG
Ferrari, AC [1 ]
Bottani, CE
Libassi, A
Tanner, BK
Teo, KBK
Robertson, J
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[2] Politecn Milan, Nucl Engn Dept, I-20133 Milan, Italy
[3] Univ Durham, Dept Phys, Durham DH1 3LE, England
关键词
diamond-like carbon; Brillouin scattering; X-ray reflectivity; Raman spectroscopy;
D O I
10.1016/S0925-9635(01)00642-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Carbon coatings of thickness down to 2 nm. are needed to increase the storage density in magnetic hard disks and reach the 100-Gbits/inch(2) target. We show that the combination of surface Brillouin scattering, X-ray reflectivity and Raman spectroscopy measurements allow us to measure the mechanical and structural properties of ultra-thin tetrahedral amorphous carbon films. Densities up to 2.8 g/cm(3) are found indicating a significant sp(3) content even in the thinnest films, Surface Brillouin scattering provides the dispersion relations of surface acoustic waves and from these the elastic constants of the films, The elastic constants of 2. 4 and 8 run-thick films are measurably different. Our results show that these ultra-thin films reach the full stiffness of tetrahedral amorphous carbons when the thickness becomes of the order of 10 nm, but even the thinnest films have a Young's modulus of at least similar to100 GPa. The combination of surface sensitivity and resonant enhancement of UV Raman, with surface enhancement effects obtained by depositing the films on Al, allows the detection of the Raman spectrum, even for the thinnest films. This is the quickest non-destructive structural probe of nanometre-thick diamond-like carbon films. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1062 / 1067
页数:6
相关论文
共 27 条
[1]   Computation of Brillouin scattering cross-sections for multilayers [J].
Amici, A ;
Beghi, MG ;
Bottani, CE .
COMPUTATIONAL MATERIALS SCIENCE, 2000, 17 (2-4) :404-408
[2]   Combined surface Brillouin scattering and x-ray reflectivity characterization of thin metallic films [J].
Beghi, MG ;
Bottani, CE ;
Ossi, PM ;
Lafford, TA ;
Tanner, K .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :672-678
[3]  
BEGHI MG, 2001, ASTM STP, V1413
[4]  
COMINS JD, 2000, HDB ELASTIC PROPERTI, V1, P349
[5]   Growth mechanism and cross-sectional structure of tetrahedral amorphous carbon thin films [J].
Davis, CA ;
Amaratunga, GAJ ;
Knowles, KM .
PHYSICAL REVIEW LETTERS, 1998, 80 (15) :3280-3283
[6]  
ERGERTON RF, 1986, ELECT ENERGY LOSS SP
[7]  
Farnell G. W., 1970, PHYS ACOUSTICS, V6, P109
[8]  
Farnell G.W., 1972, PHYS ACOUSTICS, V9, P35
[9]   Elastic constants of tetrahedral amorphous carbon films by surface Brillouin scattering [J].
Ferrari, AC ;
Robertson, J ;
Beghi, MG ;
Bottani, CE ;
Ferulano, R ;
Pastorelli, R .
APPLIED PHYSICS LETTERS, 1999, 75 (13) :1893-1895
[10]   Interpretation of Raman spectra of disordered and amorphous carbon [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107