Pyrolytic CVD of poly(organosiloxane) thin films

被引：19

作者：

Kwan, MC

Gleason, KK

机构：

[1] Department of Chemical Engineering, Massachusetts Inst. of Technology, Cambridge

来源：

CHEMICAL VAPOR DEPOSITION | 1997年 / 3卷 / 06期

关键词：

D O I：

10.1002/cvde.19970030602

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

[No abstract available]

引用

收藏

页码：299 / 301

页数：3

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