Direct-write of sensor devices by a laser forward transfer technique

被引:10
作者
Piqué, A [1 ]
Weir, DW [1 ]
Wu, PK [1 ]
Pratap, B [1 ]
Arnold, CB [1 ]
Ringeisen, BR [1 ]
McGill, RA [1 ]
Auyeung, RCY [1 ]
Kant, RA [1 ]
Chrisey, DB [1 ]
机构
[1] USN, Res Lab, Washington, DC 20375 USA
来源
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS | 2002年 / 4637卷
关键词
MAPLE direct-write; laser transfer; direct-write of sensor materials; temperature sensors; biological sensors; chemical sensors; chemiresistor;
D O I
10.1117/12.470642
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The use of direct-write techniques in the design and manufacture of sensor devices provides a flexible approach for next generation commercial and defense sensor applications. Using a laser forward transfer technique,, we have demonstrated the ability to rapidly prototype temperature, biological and chemical sensor devices. This process, known as matrix assisted pulsed laser evaporation direct-write or MAPLE DW is compatible with a broad class of materials ranging from metals and electronic ceramics to chemoselective polymers and biomaterials. Various types of miniature sensor designs have been fabricated incorporating different materials such as metals, polymers, biomaterials or composites as multilayers or discrete structures on a single substrate. The MAPLE DW process is computer controlled which allows the sensor design to be easily modified and adapted to any specific application. To illustrate the potential of this technique, a functional chemical sensor system is demonstrated by fabricating all the passive and sensor components by MAPLE DW on a polyimide substrate. Additional devices fabricated by MAPLE DW including biosensors and temperature sensors and their performance are shown to illustrate the breadth of MAPLE DW and how this technique may influence current and future sensor applications.
引用
收藏
页码:361 / 368
页数:8
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