Laser direct writing of phosphor screens for high-definition displays

被引:62
作者
Fitz-Gerald, JM
Piqué, A
Chrisey, DB
Rack, PD
Zeleznik, M
Auyeung, RCY
Lakeou, S
机构
[1] USN, Res Lab, Surface Modificat Branch, Washington, DC 20375 USA
[2] Rochester Inst Technol, Dept Microelect Engn, Rochester, NY 14623 USA
[3] SFA Inc, Largo, MD 20774 USA
关键词
D O I
10.1063/1.126040
中图分类号
O59 [应用物理学];
学科分类号
摘要
A laser-based forward transfer direct writing technique was used to deposit phosphor powder screens for high-resolution display applications. With this technique, called matrix-assisted pulsed-laser evaporation direct write, dense oxide phosphor powders of Y2O3:Eu (red) and Zn2SiO4:Mn (green) were deposited on alumina and polymer substrates. All processing was performed in air at room temperature. Cathodoluminescent measurements showed that the luminous efficiency of the phosphor powders was not degraded by the deposition process. A 6x6 red and green matrix with pixel sizes of 100 mu m (250 lines per inch) with a 100 mu m spot size is demonstrated; however, with smaller spot sizes this technique is easily scalable to pixel sizes < 10 mu m (> 2500 lines per inch). (C) 2000 American Institute of Physics. [S0003-6951(00)00710-5].
引用
收藏
页码:1386 / 1388
页数:3
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