METAL-DEPOSITION FROM A SUPPORTED METAL-FILM USING AN EXCIMER LASER

被引：550

作者：

BOHANDY, J

KIM, BF

ADRIAN, FJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 04期

关键词：

D O I：

10.1063/1.337287

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1538 / 1539

页数：2

共 13 条

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[5]

EHRLICH DJ, 1983, VLSI ELECTRONICS MIC, V7, P129

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JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1139-1142

[7] LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS [J].

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APPLIED PHYSICS LETTERS, 1985, 47 (09) :923-925

[8] LASER CHEMICAL VAPOR-DEPOSITION OF COPPER [J].

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APPLIED PHYSICS LETTERS, 1985, 46 (02) :204-206

[9] LASER-INDUCED METAL-DEPOSITION ON INP [J].

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JOURNAL OF APPLIED PHYSICS, 1982, 53 (02) :1084-1090

[10] UV LASER DEPOSITION OF METAL-FILMS BY PHOTOGENERATED FREE-RADICALS [J].

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APPLIED PHYSICS LETTERS, 1986, 48 (07) :493-495

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