UV LASER DEPOSITION OF METAL-FILMS BY PHOTOGENERATED FREE-RADICALS

被引：22

作者：

MONTGOMERY, RK ^{[1
]}

MANTEI, TD ^{[1
]}

机构：

[1] UNIV CINCINNATI, DEPT ELECT & COMP ENGN, CINCINNATI, OH 45221 USA

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 07期

关键词：

D O I：

10.1063/1.96486

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：493 / 495

页数：3

共 13 条

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[2]

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[3]

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[8] THE PHOTOCHEMISTRY OF PALLADIUM AND PLATINUM HOMONUCLEAR AND HETERONUCLEAR METAL METAL SIGMA-BONDS - EFFICIENT PHOTOGENERATION OF 15-ELECTRON RADICALS [J].

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[9] PHOTO-ELECTROCHEMICAL DEPOSITION OF METALS ONTO P-SILICON USING AN INTERNAL CELL [J].

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RAUH, RD .

APPLIED PHYSICS LETTERS, 1983, 42 (02) :193-195

[10]

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