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LOW-TEMPERATURE DEPOSITION AND REMOVAL OF MATERIAL USING LASER-INDUCED CHEMISTRY

被引：3
作者：
OSGOOD, RM
GILGEN, HH
BREWER, P
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词：
D O I：
10.1116/1.572605
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：504 / 505
页数：2
相关论文
共 7 条
[1]  
APPLETON BR, 1982, LASER ELECTRON BEAM
[2]   DIRECT OBSERVATION OF THE LOCAL-FIELD-ENHANCED SURFACE PHOTOCHEMICAL-REACTIONS [J].
CHEN, CJ ;
OSGOOD, RM .
PHYSICAL REVIEW LETTERS, 1983, 50 (21) :1705-1708
[3]   PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT [J].
EHRLICH, DJ ;
OSGOOD, RM ;
DEUTSCH, TF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01) :23-32
[4]  
EHRLICH DJ, 1982, PHYS REV LETT, V48, P1678
[5]   OPTICALLY INDUCED MICROSTRUCTURES IN LASER-PHOTODEPOSITED METAL-FILMS [J].
OSGOOD, RM ;
EHRLICH, DJ .
OPTICS LETTERS, 1982, 7 (08) :385-387
[6]   LASER MICROCHEMISTRY AND ITS APPLICATION TO ELECTRON-DEVICE FABRICATION [J].
OSGOOD, RM .
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1983, 34 :77-101
[7]  
OSGOOD RM, 1982, LASER DIAGNOSTICS PH
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