LASER MICROCHEMISTRY AND ITS APPLICATION TO ELECTRON-DEVICE FABRICATION

[1] Alferov Zh. I., 1976, Soviet Physics - Technical Physics, V21, P857

[2] ALLEN S, 1983, LASERS DIAGNOSTICS P

[3] ALLEN SD, 1981, APPL PHYS LETT, V16, P431

[4] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 183 - 185

[5] APPLETON BR, 1982, LASER ELECTRON BEAM

[6] BAUERLE D, 1982, APPL PHYS B-PHOTO, V28, P267

[7] BAUERLE D, 1983, LASERS DIAGNOSTICS P

[8] LASER PHOTO-DISSOCIATION OF HG(CH3)2 - INFRARED-EMISSION STUDIES OF VIBRATIONAL AND ROTATIONAL-EXCITATION IN THE CH3 FRAGMENTS [J]. CHEMICAL PHYSICS LETTERS, 1982, 89 (03) : 183 - 188

[9] BELYAKOV LV, 1976, SOV PHYS SEMICOND+, V10, P678

[10] EFFECT OF THE LASER RADIATION INTENSITY ON THE KINETICS OF THE HETEROGENEOUS PHOTOCHEMICAL REACTION BETWEEN SINGLE-CRYSTAL GERMANIUM AND BROMINE GAS. [J]. 1978, 8 (11): : 1310 - 1312

[1] Alferov Zh. I., 1976, Soviet Physics - Technical Physics, V21, P857

[2] ALLEN S, 1983, LASERS DIAGNOSTICS P

[3] ALLEN SD, 1981, APPL PHYS LETT, V16, P431

[4] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 183 - 185

[5] APPLETON BR, 1982, LASER ELECTRON BEAM

[6] BAUERLE D, 1982, APPL PHYS B-PHOTO, V28, P267

[7] BAUERLE D, 1983, LASERS DIAGNOSTICS P

[8] LASER PHOTO-DISSOCIATION OF HG(CH3)2 - INFRARED-EMISSION STUDIES OF VIBRATIONAL AND ROTATIONAL-EXCITATION IN THE CH3 FRAGMENTS [J]. CHEMICAL PHYSICS LETTERS, 1982, 89 (03) : 183 - 188

[9] BELYAKOV LV, 1976, SOV PHYS SEMICOND+, V10, P678

[10] EFFECT OF THE LASER RADIATION INTENSITY ON THE KINETICS OF THE HETEROGENEOUS PHOTOCHEMICAL REACTION BETWEEN SINGLE-CRYSTAL GERMANIUM AND BROMINE GAS. [J]. 1978, 8 (11): : 1310 - 1312