LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS

被引:56
作者
GROSS, ME
FISANICK, GJ
GALLAGHER, PK
SCHNOES, KJ
FENNELL, MD
机构
关键词
D O I
10.1063/1.95981
中图分类号
O59 [应用物理学];
学科分类号
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页码:923 / 925
页数:3
相关论文
共 17 条
[1]   EXPLOSIVE CRYSTALLIZATION OF A-SI FILMS IN BOTH THE SOLID AND LIQUID-PHASES [J].
AUVERT, G ;
BENSAHEL, D ;
PERIO, A ;
NGUYEN, VT ;
ROZGONYI, GA .
APPLIED PHYSICS LETTERS, 1981, 39 (09) :724-726
[2]  
BALLARD KH, 1949, Patent No. 2490399
[3]  
BAUERLE D, 1984, LASER PROCESSING D 3
[4]   CRYSTALLIZATION-FRONT VELOCITY DURING SCANNED LASER CRYSTALLIZATION OF AMORPHOUS-GE FILMS [J].
CHAPMAN, RL ;
FAN, JCC ;
ZEIGER, HJ ;
GALE, RP .
APPLIED PHYSICS LETTERS, 1980, 37 (03) :292-295
[5]   SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J].
DEUTSCH, TF ;
GEIS, MW .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :7201-7204
[6]  
EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[7]   LASER-INITIATED MICROCHEMISTRY IN THIN-FILMS - DEVELOPMENT OF NEW TYPES OF PERIODIC STRUCTURE [J].
FISANICK, GJ ;
GROSS, ME ;
HOPKINS, JB ;
FENNELL, MD ;
SCHNOES, KJ ;
KATZIR, A .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1139-1142
[8]  
FISANICK GJ, 1985, APPL PHYS LETT, V45, P1184
[9]  
FITCH HM, 1966, Patent No. 3268568
[10]  
GERASSIMOV RB, 1982, 12TH IEEE INT QUANT, P266