STRUCTURAL AND DIELECTRIC-PROPERTIES OF SPIN-ON BARIUM-STRONTIUM TITANATE THIN-FILMS

Barium-strontium-titanate (Ba0.5Sr0.5)TiO3 thin film capacitors fabricated by a spin-on technique were studied. At room temperature the films have high dielectric constant ε, ranging from 22 to 151 at 1 MHz. Complex impedance spectroscopy was used in order to measure the frequency dependence of their dielectric properties. Cole-Cole reactance versus resistance of experimental data in the frequency range 10 Hz-10 MHz show semicircular behavior indicative of current leakage. The current leakage is proportional to the dielectric constant and in particular the lowest leakage current we measured at 1 MHz was 3×10-5 A/cm2 on samples with ε=22. © 1995 American Institute of Physics.