SrBi2Ta2O9(SBT) thin films prepared by electrostatic spray

Ferroelectric SrBi(2)Ta(2)O9 (SBT) thin films were deposited on Pt/SiO2/Si substrates by electrostatic spray, and their structural and electrical properties were investigated. The spray-coated films crystallized upon heating at 680 degrees C-760 degrees C. The XRD patterns showed distinct peaks of (105), (110) and (200) orientations. P-E hysteresis loops were observed with a typical coercive field around 55kV/cm. The remanent polarization, 2P(r), was above 12 mu C/cm(2) for a 160nm film. The fatigue endurance was good, as the reduction of P-r during 10(12) switching cycles was less than 10% of its initial value. The electrostatic spray technique is capable of injecting submicron, stoichiometrically correct, metal-organic SBT droplets onto a rotating substrate, and has the potential to achieve a better step coverage than the spin-on technique while keeping its original advantages.