A rapid-response, high-sensitivity nanophase humidity sensor for respiratory monitoring

被引：39

作者：

Kalkan, AK ^{[1
]}

Li, HD ^{[1
]}

O'Brien, CJ ^{[1
]}

Fonash, SJ ^{[1
]}

机构：

[1] Penn State Univ, Ctr Nanotechnol Educ & Utilizat, University Pk, PA 16802 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2004年 / 25卷 / 08期

关键词：

biomedical monitoring; humidity detectors; nanotechnology; silicon; thin film devices;

D O I：

10.1109/LED.2004.832657

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel ionic-type humidity sensor based on a plasma-deposited nanophase Si thin film was developed. Detection of relative humidity cycles between 20% and 90% was possible in less than or equal to0.2 s with similar to5 orders of magnitude variation in conductance. Such superior performance is attributable to the unique arrayed column-void network structure and ultrafine thickness (e.g., 50 nm) of the Si film as well as to the lateral electrode configuration. Our sensor can be miniaturized, integrated with signal processing circuits, and fabricated on plastics. A crucial implementation, where our sensor would be very suitable and beneficial, is respiratory monitoring.

引用

页码：526 / 528

页数：3

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