Multiple-input microcantilever sensors

被引：90

作者：

Britton, CL

Jones, RL

Oden, PI

Hu, Z

Warmack, RJ ^{[1
]}

Smith, SF

Bryan, WL

Rochelle, JM

机构：

[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA

[2] Univ Tennessee, Knoxville, TN 37996 USA

来源：

ULTRAMICROSCOPY | 2000年 / 82卷 / 1-4期

关键词：

multiple-input chemical sensing; microcantilever; absorption-induced stress;

D O I：

10.1016/S0304-3991(99)00155-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：17 / 21

页数：5

共 7 条

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